Components
Rotatable Magnetrons
- Standard end block →
- VAC-MAG® end block →
- Compact end block →
- Axial magnetrons →
Planar Magnetrons
- HLK 7® cathode body →
- PL 44® cathode body →
- HRC® cathode body →
- OAPC® cathode body →
Magnet Bars
- Adjustable →
- Online adjustable →
- Customized arrays →
Integration Components
- Gas distribution →
- Control cabinets →
- Cathode shield sets →
- Coater shield sets →
- Coater spare parts →
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