Components

Components

Rotatable Magnetrons

  • Pulse smart end block (new)
  • Standard end block
  • VAC-MAG® end block
  • Compact end block
  • Axial magnetrons

Planar Magnetrons

  • Trax HLK 7® cathode body
  • Trax PL 44® cathode body
  • E-Trax OAPC® cathode body

Magnet Bars

  • Reflex: Adjustable
  • E-Reflex: Online adjustable
  • Customizable arrays

Integration Components

  • Gas distribution
  • Control cabinets
  • Coater shield sets
  • Coater spare parts

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